发明名称 Mechanism for transporting semiconductor-process masks
摘要 A system for transporting an article between a loading station and an inspection stage includes a novel support for safely retaining the article during transit. The support includes a number of article-retaining members, at least one of which is connected to an actuator. The actuator clamps the article between the article-retaining members during transit. To ensure that the article is not dropped or damaged during transit, the system includes an un-clamp sensor connected to at least one of the article-retaining members. The un-clamp sensor is connected to a robot controller so that the system may be shut down immediately should the article become unclamped during transit. The system also includes novel loading and inspection stages that ensure proper orientation and placement of articles prior to transit from one to the other, further reducing risk of damage to transported articles.
申请公布号 US5980187(A) 申请公布日期 1999.11.09
申请号 US19970839287 申请日期 1997.04.16
申请人 KLA-TENCOR CORPORATION 发明人 VERHOVSKY, YULI
分类号 B65G49/07;H01L21/677;H01L21/687;(IPC1-7):B65G1/06 主分类号 B65G49/07
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