SUBSTRATE CARRYING DEVICE/METHOD

摘要

PROBLEM TO BE SOLVED: To improve the substrate holding force of a substrate holding means in a substrate carrying device and method for holding a substrate from the lower part by a substrate holding means. SOLUTION: A substrate 1 is carried to a horizontal direction, while the substrate is inclined with a descending slope from the upstream side to downstream side of the horizontal direction, in which the substrate 1 is carried. Thus, ascending air current 30 is formed along the surface of the substrate by carrying the substrate, and a force (down-force) for pressurizing the substrate 1 to a hand (substrate holding means) 11 by the air current so that a substrate holding force can be increased by that amount.