发明名称 Power trench DMOS with large active cell density
摘要 A design for a trench DMOS transistor having improved current carrying capability is presented. The principal improvement lies in the periodic replacement of the individual cells in the array with a protection cell of a different size. When this is done it becomes possible to significantly increase the density of cells per unit area. This results in a corresponding improvement in the amount of channel area available to the device and hence an increase in its current carrying capability.
申请公布号 US5981999(A) 申请公布日期 1999.11.09
申请号 US19990226278 申请日期 1999.01.07
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 LIU, CHUNG-MIN;HUNG, CHIEN-CHUNG;TSAI, MING-JINN;KAO, MING-JER;YAO, JUNE-MIN
分类号 H01L27/088;H01L29/06;H01L29/78;(IPC1-7):H01L29/10 主分类号 H01L27/088
代理机构 代理人
主权项
地址