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发明名称
THIN FILM FORMING MATERIAL AND FORMATION OF THIN FILM
摘要
申请公布号
JPH11310869(A)
申请公布日期
1999.11.09
申请号
JP19980132637
申请日期
1998.04.28
申请人
OPUTORON:KK;CANON INC
发明人
AOKI TOMONORI
分类号
C23C14/12;C23C14/24;(IPC1-7):C23C14/12
主分类号
C23C14/12
代理机构
代理人
主权项
地址
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