MANUFACTURE OF SEMICONDUCTOR SINGLE-CRYSTAL SILICON,申请号JP19980134355-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR SINGLE-CRYSTAL SILICON
摘要
申请公布号	JPH11312683(A)	申请公布日期	1999.11.09
申请号	JP19980134355	申请日期	1998.04.28
申请人	SUMITOMO METAL IND LTD	发明人	NINOMIYA MASAHARU
分类号	C30B15/04;C30B29/06;H01L21/322;(IPC1-7):H01L21/322	主分类号	C30B15/04
代理机构		代理人
主权项
地址

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