| 摘要 |
PROBLEM TO BE SOLVED: To provide an NG stocker to simplify the structure of unloader. SOLUTION: A substrate 1 delivered from an inspection device is conveyed by a first conveyor mechanism 2, and a vacant magazine 10 is conveyed by a second conveyor mechanism 3. The magazine 10 delivered from the conveyor mechanism 3 is raised up by an elevator mechanism 5 to the position where the substrate 1 on the elevator mechanism 5 can be placed in the magazine. The substrate 1 on the conveyor mechanism 2 is extruded by a first extruder mechanism 6 into the magazine 10 on the elevator mechanism 5. The substrate 1 judged by the inspection device to be normal is extruded by a second extruder mechanism 7 outside the magazine 10. The magazine 10 made full of the substrates 1 is conveyed by a third conveyor mechanism. |
