| 摘要 |
An apparatus for isolating defects in an integrated circuit using near field scanning photon emission microscopy comprises a photon collector 10 which receives emitted photons 16 from a surface 14 of an energized or biased integrated circuit 12, a CCD camera 20 for converting the photons into an emission image 22, and an optical fiber 18 coupling the CCD camera 20 to the photon collector 10, so that the optical fiber transmits photons from the collector to the CCD camera. As a result, defects in integrated circuits can be isolated with greater resolution than currently available using conventional far field photon emission microscopy.
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