| 摘要 |
PROBLEM TO BE SOLVED: To prevent the unnecessary interlinkage of magnetic flux to a wiring for a superconducting-quantum interference element and to improve sensibility, by a method wherein each pair of wirings is collected to one side of a pickup coil and denied mutually, a pair of the wirings are laminated to upper and lower sections and coupled magnetically, and the effect of denying is enhanced. SOLUTION: A YBa2 Cu3 Ox (YBCO) superconducting thin-film is formed onto a strontium titanate bicrystal substrate, and the pattern of a lower electrode layer containing pickup coils 31, 36, a superconducting quantum interference element 32, a bias power-supply line 33 and a power-supply line 34 for a feedback coil is formed by ion etching. A ceria thin-film is shaped, and removed while leaving a crossing section superposed to an upper superconducting electrode layer and a laminating section, the YBCO thin-film is formed again, and an input coil 35 and the laminating section 37 and crossing section of wirings are prepared. Since wirings passed by the side of the pickup coil 36 for erasing a magnetic field are formed in upper and lower two layers, generated magnetic fields are cancelled mutually, and hardly have an effect. |
