| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the dispersion of the microscopic magnetic characteristics existing in a magnetic film by forming the magnetic film in contact with a surface having surface ruggedness of a specific nm p-p or smaller in the vertical direction of a substrate of the surface and of a specificμm p-p or larger in the horizontal direction of the substrate. SOLUTION: A magnetic film is touchingly formed on a surface having surface ruggedness of <=10 nm p-p in the vertical direction of a substrate and of >=1μm p-p in the horizontal direction of the substrate. An MgO film is formed on the surface of a substrate 1 as a base film 2 by the ECR sputtering method and a Cr85 Ti15 film is formed on the base film 2 as an orientational property control film 3 by the DC sputtering method. Here, the Cr85 Ti15 film is used as the orientational property control film 3, but the material and composition of the control film 3 are decided based on the material, film structure, and composition of a magnetic film 4 formed on the control film 3. Successively, a Co69 Cr19 Pt12 film is formed on the control film 3 as the magnetic film 4 by the DC sputtering method. Finally, a carbon protective film 5 is formed on the magnetic film 4 by the DC sputtering method.</p> |
