发明名称 |
Static electricity chuck and wafer stage |
摘要 |
There are provided a static electricity chuck which can vary the temperature of a wafer in a short time without adversely effecting throughput, and a wafer stage having the static electricity chuck. The static electricity chuck includes a dielectric member 4 formed of insulating material, an electrode 5 of conductor which is disposed at the lower side of the dielectric member 4, and a heater 6 which is disposed at the lower side of the electrode 5 and heats the dielectric member 4. The wafer stage 1 includes the static electricity chuck which is provided on a metal jacket having cooling apparatus.
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申请公布号 |
US5981913(A) |
申请公布日期 |
1999.11.09 |
申请号 |
US19970821334 |
申请日期 |
1997.03.20 |
申请人 |
SONY CORPORATION |
发明人 |
KADOMURA, SHINGO;JOZAKI, TOMOHIDE;HIRANO, SHINSUKE;MIYASHITA, KINYA;MIYATA, SEIICHIROU;TATSUMI, YOSHIAKI |
分类号 |
B23Q3/15;H01L21/00;H01L21/302;H01L21/3065;H01L21/683;H02N13/00;(IPC1-7):H05B3/68;C23C16/00;B23B5/22 |
主分类号 |
B23Q3/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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