发明名称 |
Semiconductor device and field effect transistor |
摘要 |
A dummy gate is removed together with an SiO2 film thereon by lift-off to form a reverse dummy-gate pattern with the SiO2 film. A photoresist pattern is formed to cover the reverse dummy-gate pattern and an SiN protection film therebetween, and a mesa pattern is formed by mesa etching. The photoresist pattern is etched so that the edge of the photoresist pattern is located between the edge of the mesa pattern and the edge of the reverse dummy-gate pattern and the exposed part of the SiN protection film is etched. The edge of the SiN protection film is thus located inside the edge of the mesa pattern.
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申请公布号 |
US5982023(A) |
申请公布日期 |
1999.11.09 |
申请号 |
US19970951160 |
申请日期 |
1997.10.15 |
申请人 |
SANYO ELECTRIC CO., LTD. |
发明人 |
MATSUSHITA, SHIGEHARU;FUJII, EMI;INOUE, DAIJIRO |
分类号 |
H01L21/285;H01L21/338;H01L21/76;H01L29/812;(IPC1-7):H01L29/06;H01L29/80;H01L31/032 |
主分类号 |
H01L21/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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