OPTICAL COUPLING MODULE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To manufacture an optical coupling module which is easily aligned and usable as an optical communication terminal station capable of reducing the manufacturing cost. SOLUTION: This optical coupling module 10 includes a semiconductor substrate 14 which has a top surface 14a processed into a mirror surface and also has an optical function element 11 mounted on the top surface so that its optical function surface is almost in parallel to the top surface 4a and the opposite-side reverse surface faces the top surface 14a and an optical device 15 which is supported on the top surface 14a of the semiconductor substrate so that it is optically coupled with the optical function element 11.