Gas flow pass

摘要

A gas flow pass has a gas flow direction deflecting member arranged in the gas flow pass for deflecting a gas flow direction outward with respect to a center of the gas flow pass, and a foreign substance trapping member arranged at a downstream position of the gas flow direction deflecting member and arranged on a part of or all of an inner surface of the gas flow pass. Therefore, it is possible to obtain the gas flow pass which can prevent a damage of the foreign substances in the gas flow and have a long term reliability.