| 摘要 |
PURPOSE:To obtain a full solid-state type electrochromic element whose performance is stabilized and improved by using a metallic Ni and H2O vapor as an evaporating material and lead-in gas, respectively, and forming an electrochromic layer by an ion plating device. CONSTITUTION:The first electrode 2 of an ITO film provided with a suitable lead-out electrode part and a lead part is formed on a substrate 1 consisting of a glass plate, and it is installed in an ion plating device 10. The inside of the device is made to form a vacuum of 5.0X10<-4>Torr, a metallic Ni is used as a vapor-depositing material, H2O vapor is led in from an H2O vapor supply source 16, and a film of an electrochromic layer 3 being an anode side color developing layer is formed on the first electrode 2. In that case, quantity of the led- in H2O vapor is adjusted in accordance with the vacuum degree by a needle valve 17. Ta2O5 is formed as an insulating layer 4 on said electrochromic layer 3, and also on these films, a translucent Au conductive film is formed as the second electrode 5. |
