发明名称 Method and device for imaging measurements and use of measured information in process control
摘要 The object of the invention is a method for carrying out an imaging measurement, an imaging measurement device and the use of the measured information in the control of a process. In the measurement device (40) according to the invention there is an imaging detector (43) as well as means (41a; 41b; 41c, 42) for splitting the electromagnetic radiation obtained from the target (10) into at least first (47a) and second (47b) part which differ at least partly by their spectral bands, and for focusing said at least first (47a) and second (47b) part onto a detector (43) so that at least first (48a) and second (48b) image of the target (10) that is being imaged are formed in an overlapping fashion on the detector (43).
申请公布号 AU3423699(A) 申请公布日期 1999.11.08
申请号 AU19990034236 申请日期 1999.04.16
申请人 JUHA VATTULAINEN 发明人 JUHA VATTULAINEN;JUSSI TENHUNEN
分类号 G01J5/60 主分类号 G01J5/60
代理机构 代理人
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