| 摘要 |
PURPOSE:To make position difference inspection possible without preparing position information for each hole in qualified product data and obtain an economical apparatus system capable of inspecting at high speed, regarding an inspection of hole piercing in a substrate. CONSTITUTION:A substrate 1 in which a large number of holes 11 are pierced is mounted on a XY table 2. While receiving an instruction of inspection position from a system controlling apparatus 9, a XY table controlling apparatus 8 drives the XY table 2 through X- and Y-axes motors 6, 7, so that the desired inspection position of the substrate 1 is positioned in a visible field of the sensor 4. An image processing apparatus 5 takes in the image information of the sensor 4 and calculates the pitch between neighboring holes after obtaining each hole position and then whether position difference occurs or not is determined by comparing the calculated pitch with a standard pitch. |
