| 摘要 |
PURPOSE:To utilize efficiently a heat source such as an infrared lamp for vapor deposition on a wafer or the like by using transparent quartz glass having a low OH concn. as the material of at least the part of a bell jar made of quartz glass for heating. CONSTITUTION:Transparent quartz glass having <=10ppm OH concn. is used as the material of at least the part of a bell jar made of quartz glass for heating. The bell jar is used to carry out vapor deposition. The transparent quartz glass is obtd. by melting quartz powder by heating in vacuum. The bell jar itself is not heated, and a heat source such as an infrared lamp can be utilized effectively, so the quantity of electricity to be used can be reduced. |
