| 摘要 |
PURPOSE:To conduct accurate measurement of the degree of vacuum when ferromagnetic material metal sticks to a base body by irradiating a ferromagnetic material metal layer with light and measuring its glossiness. CONSTITUTION:A vaporization source 6 is heated to vaporize the ferromagnetic material metal 7, which is vapor-deposited on the base base at a specific angle of incidence. The base 3 on which the ferromagnetic material metal 7 is vapor- deposited is cooled by a can 5 and its glossiness is measured by an optical monitor 9 before it runs to a take-up roller 4. When the kind of the ferromagnetic material metal 7 and its angle of incidence are predetermined, the degree of vacuum and glossiness are in 1:1 proportion and a graph showing the proportion is found previously to measure the degree of vacuum in the vapor deposition of the ferromagnetic material metal 7 on the base 3 from the glossiness of the ferromagnetic material metal layer. Thus, the degree of vacuum when the ferromagnetic material metal 7 is vapor-deposited on the base 3 is measured accurately to control characteristics of the ferromagnetic material metal layer more accurately. |
