| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device capable of accurately measuring even in the case of a large mechanical structure. SOLUTION: A three-dimensional shape measuring device 20 is provided with an XY positioning table 21 having a reference flat surface (XY flat surface) facing the surface 2 to be measured including measuring points S at three- dimensional positions (X, Y, Z) and a Z-axis position measuring means 41 for obtaining the distance in the Z-axis direction from the reference flat surface 22 to the measuring point S. This device 20 is formed so that a displacement (ΔX,ΔY,ΔZ,θX,θY,θZ) generated in the reference flat surface 22 can be obtained by a laser interference meter 80, the reference laser light sources 61, 66, the position detecting sensors 31, 32, 35, 36 and the pentagonal prisms 23, 24. The displacement generated in the reference flat surface 22 is corrected in a fine adjustment stage 26, and the reference flat surface 22 is accurately positioned so as to accurately measure the measuring points S.
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