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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11307525(A)
申请公布日期
1999.11.05
申请号
JP19980111696
申请日期
1998.04.22
申请人
TOSHIBA CORP
发明人
TAKAHASHI SHINYA
分类号
H01L21/312;(IPC1-7):H01L21/312
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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