| 摘要 |
PROBLEM TO BE SOLVED: To facilitate of easy confirninement of the state of carrier robot, when troubles occurred on the carrier robot, and also easily performing the resetting work. SOLUTION: When a carrier robot carries a substrate, the existence of a substrate is detected by the substrate detecting sensors 21a, 21b which are provided on the return positions of respective arms 31a, 31b. When a main controller detects abnormal conditions in the existence of the substrate on the arms by the substrate sensors 21a, 21b, it stops the carrier robot, while giving an alarming command also displaying an alarming image plane on an operation panel. In addition, the main controller gives a command to a carrier robot controller for shifting the carrier robot to a specific confirmable position based on the input from the operation panel. Through these procedures, the carrier robot is shifted to an easily and visually confirmable position of an operator. |
