| 摘要 |
The present invention provides, among other things, a plenum which is formed around the hot zone chamber of a vacuum furnace and which has a common wall with the hot zone chamber. The present arrangement includes having a plurality of apertures formed in the common wall and a plurality of baffles, or deflecting means, secured to the common wall within the chamber of the plenum. The baffles, or deflecting means, are formed to be angular with respect to the common wall and each deflecting means is disposed and formed to deflect gas (in all likelihood, inert gas), passing through the plenum, into and through an associated aperture and thereby into the hot zone chamber. By using the baffles, the inert gas, which is fed into the hot zone chamber from the plenum, is so fed with improved and significant uniformity.
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