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发明名称
FORMING METHOD OF OXIDE FILM
摘要
申请公布号
JPH11307526(A)
申请公布日期
1999.11.05
申请号
JP19980115151
申请日期
1998.04.24
申请人
NEC CORP
发明人
ANDO KOICHI
分类号
H01L29/78;C23C8/10;H01L21/28;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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