MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19980113597-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH11307431(A)	申请公布日期	1999.11.05
申请号	JP19980113597	申请日期	1998.04.23
申请人	SONY CORP	发明人	KAMIYA MASAYUKI
分类号	G03F7/20;G03F7/207;H01L21/027;H01L21/3205;(IPC1-7):H01L21/027;H01L21/320	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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