| 摘要 |
PROBLEM TO BE SOLVED: To prevent the deterioration of the activity ratio of a semiconductor aligner, by surely communicating information to an operator even when an error or assist demand is generated in the semiconductor aligner in a situation in which the operator cannot monitor the remote controller of the semiconductor aligner. SOLUTION: A ratio communication equipment for transmitting information is loaded on a remote controller 2 for remote controller one or more semiconductor aligners 1, and information is transmitted according to the generation of an error or assist demand in the semiconductor aligner 1. An operator carries an information receiving device 10 such as a pager for receiving information transmitted from the remote controller 2 anytime. |
