DEVELOPING DEVICE AND DEVELOPING METHOD

摘要

PROBLEM TO BE SOLVED: To recover a developer in the state of not contg. air without splashing the developer to a mist form. SOLUTION: When the prescribed time elapses after the developer is built up on a substrate W surface, a motor 14 is driven to rotate the substrate W at 5 to 200 rpm to remove the developer built up on the substrate W. Since the speed of the developer removed from the substrate W is slow, the developer of a greater ratio of the developer splashing from the substrate W falls onto a sloping part 17 constituting a cup bottom part 8 and flows toward the outer side in a diametral direction along the slope of this sloping part 17. This developer flows into a developer recovering pocket 25 and is recovered in a tank by driving of a pump. This developer is recycled.