| 摘要 |
PROBLEM TO BE SOLVED: To increase the storage capacity of substrate storing means such, as a reticle library and reduce the number of times of replacement of substrates by disposing a plurality of substrate storing means on the specified circumference with a transfer means at the center. SOLUTION: On the side of a robot 37 of a transfer means, four reticle libraries L1-L4 which are substrate storing means for storing a plurality of reticles R in respective reticle cases RC are disposed rotatably on a rotary body on a base 34. Then, a robot 41 similar to the robot 37 is located at the center of the four reticle libraries L1-L4. The robots 37 and 41 exchange the reticles R via a reticle library buffer 39 located under the reticle library L2. As a result of this method, the number of times of replacement of substrates can be lessened and the productivity can be improved. |
