| 摘要 |
PROBLEM TO BE SOLVED: To avoid waste of utilization efficiency caused by many pieces of analyses by forming the conformal mapping of a reference film from a defocus image of the reference film, conducting orthogonality judgment, and analyzing strain of one piece of defocus image to obtain correct result when judged that this is the conformal mapping of the actual reference film. SOLUTION: This electron microscope has a function mapping a defocusing image of a reference image on a (x+δx , y-δy ) plane, a function judging whether sequence of points corresponding to the lattice point of x = constant in the (x, y) plane appearing in the mapping and sequence of points corresponding to the point of y = constant perpendicularly cross everywhere, and a function selecting decision of magnetic information fromδx andδy at that time or decision by a method obtaining a plurality of defocusing images, based on judging results. A plurality of defocusing images can be obtained only when it is required, and as a result, observation efficiency can be enhanced without damaging accuracy and reliability.
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