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发明名称
CHECKING DEVICE OF BUMP ELECTRODE
摘要
申请公布号
JPH11304445(A)
申请公布日期
1999.11.05
申请号
JP19980116580
申请日期
1998.04.27
申请人
NICHIDEN MACH LTD
发明人
TANAKA SADAKI
分类号
G01B11/24;H01L21/66;(IPC1-7):G01B11/24
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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