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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11307538(A)
申请公布日期
1999.11.05
申请号
JP19980108228
申请日期
1998.04.17
申请人
SONY CORP
发明人
KANEMATSU SHIGERU
分类号
H01L29/73;H01L21/331;H01L21/8228;H01L27/082;H01L29/732;(IPC1-7):H01L21/331;H01L21/822
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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