| 摘要 |
PURPOSE:To maintain the uniformity of ultrasonic wave output and that of quality among plural products by forming a reinforced plate fixed to both sides faces in lengthwise direction at the rectangular back plate with an elastic member with a small thermal expansion coefficient. CONSTITUTION:A plastic or rubber group back plate 4 is provided to the piezoelectric element 1 made of lead titanate and zirconate, and the flat reinforced plates 10, 11 are fixed and mounted respectively to both side faces in lengthwise direction of the back plate 4. The reinforced plates 10, 11 are constituted of the elastic member having a small thermal expansion coefficient and then since the ultrasonic wave vibrator 1 is bonded with heating to the back plate 4, it is possible for the ultrasonic wave vibrator 1 to maintain a flat shape through the action of the reinforced plates 10, 11. Thus, the dicing processing of the ultrasonic wave vibrator 1 is attained uniformly with high accuracy and the close thickness of the matching layer is attained. |
