| 摘要 |
PROBLEM TO BE SOLVED: To obtain an optical waveguide layer having good crystallinity and alignment property and to lessen optical waveguide losses and the propagation loss of surface acoustic waves. SOLUTION: This device is constituted by depositing ZnO by a laser abrasion method on a glass substrate 10 for forming an optical waveguide layer 20 and planarization of the surface of the optical waveguide layer 20 by mechanical polishing or etching. The optical waveguide layer 20 may be formed by depositing a first layer by the laser abrasion method and depositing a second layer thereon by a sputtering method. |
