| 摘要 |
PROBLEM TO BE SOLVED: To improve abrasion resistance and corrosion resistance, by forming an aluminum oxide coat layer which is mainly formed of amorphous substance with specified film thickness on the surface of an Fe-B-R system permanent magnet whose main phase is a tetragonal phase through the Al or Ti coat with specified film thickness. SOLUTION: A corrosion resistant permanent magnet cleans the surface of an Fe-B-R system magnet body with surface sputtering by Ar ions by using an arc ion plating device. Then, Al or Ti is evaporated by Ar gas pressure 0.2 Pa and bias voltage -50 V. Then, an Al or Ti coat layer whose film thickness is 0.06 μm-30 μm is formed on the surface of the magnetic body by an arc ion plating method. A substrate temperature is kept to 250 deg.C and an aluminum oxide coat layer whose film thickness is 0.1-10 μm is formed on the Al or Ti coat by a vapor phase deposition method with the condition of O2 gas voltage, 0.8 Pa and bias voltage -80 V. Thus, an O2 gas single body or Ar gas containing O2 gas is used for gas containing O2 by the vapor phase deposition method. |
