| 摘要 |
PROBLEM TO BE SOLVED: To set both the mode of electron microscope and the mode of fluorescent X-ray analyzer by one apparatus, and to form extrafine X-ray beams without lowering utilizing efficiency of the X-rays in the mode of fluorescent X-ray analyzer. SOLUTION: In this analytical electron microscope 1, when a target 10 is inserted between an objectless 8 and a sample 9, the mode of fluorescent X-ray analyzer is set, and when the target 10 is removed from between them, the mode of scanning electron microscope is set. In the mode of fluorescence X-ray analyzer, valve operation of a supporting member 12 of the target 10 airtightly blocks the electron ray generating side A from the sample 9 side B, within a casing 4. Thereby, the sample 9 side B can be set in atmosphere of the room air or helium, with the electron ray generating side A being held with high vacuum. Thus, one analytic electron microscope can carry out both the function of the fluorescence X-ray analyzer and the function of the scanning electron microscope. |
