ACTIVE MATRIX SUBSTRATE, ITS MANUFACTURE, LIQUID CRYSTAL PANEL, AND ELECTRONIC INSTRUMENT USING ITS PANEL

摘要

PROBLEM TO BE SOLVED: To provide an active matrix substrate capable of using switching elements of simple structure, reducing the rate of areas occupied by switching elements on a liquid crystal substrate and maintaining the characteristics of these switching elements so that the characteristics are not almost changed even when the flowing direction of a current is changed. SOLUTION: The active matrix substrate 20 is provided with a substrate 22, signal lines arrayed on the substrate 22 in a prescribed pattern, thin film diode(TFD) elements 30 connected to the signal lines, and pixel electrodes connected to the TFD elements 30. The TFD element 30 to be used for the active matrix substrate 20 is provided with a 1st conductive film 32 consisting of a prescribed conductive material, an element insulating film 38 covering the surface of the film 32, a non-element insulating film 34 covering the surface of the film 38 and having a through-hole 35 formed on the upper part of the film 32, and a 2nd conductive film 40 consisting of the same conductive material as that of the 1st conductive film 32, brought into contact with the film 38 and covering the through-hole 35.