| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a measuring method by an electronic probe microanalyzer with an automatic focalizing mechanism enabling to measure even the sample having a greatly irregular surface in a short period of time without depending on the surface of the sample. SOLUTION: Focalization is automatically carried out at all the lattice points before the practical analysis, by specifying endpoints defining an analyzed area of the sample and a lattice point condition for segmenting the analyzed area into lattice minute segmented areas. Then, coordinates of the focalized position and failure information of focalizing operation are stored. Manual focalization is carried out at the lattice points where the automatic focalizing operation has resulted in failure, and the focalized positions are stored. Thus, surface analysis is carried out according to the specification of the lattice points and the measured coordinates.</p> |
