发明名称 FLAT MASK FOR SHADOW MASK AND THIN PLATE FOR SHADOW MASK
摘要 PROBLEM TO BE SOLVED: To provide a flat mask for a shadow mask without stripe unevenness, by lowering visibility of the stripe unevenness generated by etching. SOLUTION: In this flat mask for a shadow mask, surface-roughness of an electron beam permeating hole meets following formulae, Ra=0.2-1.0μm, Rq=0.3-1.5μm, 1.0<Rq/Ra<=2.0. Preferably, Rq/Ra=1.2-1.5 or Rq=0.3-1.0μm, and desirably, the flat mask is made of a Fe-Ni alloy material.
申请公布号 JPH11307005(A) 申请公布日期 1999.11.05
申请号 JP19980114926 申请日期 1998.04.24
申请人 HITACHI METALS LTD 发明人 UCHIDA MASATSUGU;KUBOI TAKESHI;ONE SHOZO
分类号 C22C38/00;H01J29/07;(IPC1-7):H01J29/07 主分类号 C22C38/00
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