发明名称 OSCILLATING ACTUATOR
摘要 PROBLEM TO BE SOLVED: To prevent the deterioration of the driving efficiency of an ultrasonic actuator by accurately restricting the vibrator of the actuator by eliminating the clearance, which has been formed between the vibrator and its supporting member in the conventional examples. SOLUTION: An oscillating actuator 10 is provided with a vibrator which has a piezoelectric body 13 and drive force extracting sections 12a and 12b and causes relative motions against a relative motion member 21 by causing first oscillation which oscillates in the direction of the relative motions and second oscillation which oscillates in the perpendicular direction, a base member, a pressurizing member which brings a vibrator 11 and member 21 into pressure contacting with each other, and a fixing member which fixes the vibrator 11 to the base member. The fixing member is composed of a plate spring and a supporting plate and the plate spring is welded to both end sections of the vibrator 11 in the width direction at the position, where an arresting pin press- fitted in the through-hole of the supporting plate becomes the command node of the first and second oscillations occurring at the vibrator 11.
申请公布号 JPH11308883(A) 申请公布日期 1999.11.05
申请号 JP19980109747 申请日期 1998.04.20
申请人 NIKON CORP 发明人 SUGAYA ISAO;MATSUMOTO TAKESHI
分类号 H02N2/00 主分类号 H02N2/00
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