| 摘要 |
PROBLEM TO BE SOLVED: To provide a processed piece carrier system for carrying in and out the processed element to a vacuum processing chamber performing a specific process to the element, under a specific vacuum state capable of miniaturizing the vacuum processing chamber, as well as saving the required carrier time of the processed element for improving the element processing throughput. SOLUTION: In a processed piece carrier system for carrying in and out a processed element W to a vacuum processing chamber 1 for performing a specific process to the processed element W under a specified vacuum state, a first valve body 31 opening and closing the first aperture part 21 of a preparatory vacuum chamber 2 communicating with a vacuum processing chamber 1 is supported either by a valve body supporting axle 302 erected on an eccentric position shifting out of the central part of the valve body, or by another supporting axle 301 erected on the first valve body 31 so as not to cause bending moment, when the preparatory vacuum chamber 2 is under an atmospheric pressure also through the intermediary of a sideways letter U shaped member forming a robot passing recession S. |
