| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating furnace, capable of highly accurate heat treating which is necessary when it is an especially high functional material and the whole material is greatly affected even if by a very small await of impurities as well as a heat treatment method. SOLUTION: A heating furnace 10, having a heating chamber 10b and a loadlock chamber 10a, is provided, and after the loadlock chamber 10a is loaded with works 12, the atmosphere in this loadlock chamber 10a is substituted for the heat treating gas atmosphere in the heating chamber 10b, and then this loadlock chamber 10a and the heating chamber 10b are conducted so as to shift the works 12 to the heating chamber 10b for providing the heating furnace 10 to perform the heat treatment. |
