| 摘要 |
PROBLEM TO BE SOLVED: To realize a confocal microscope capable of detecting the surface of a sample even when the surface of the sample is a steep slope having metallic luster. SOLUTION: The confocal microscope for obtaining a confocal image by rotating a disc having plural apertures, converging light passed through the aperture and scanning a sample 13 with the converged light is provided with a light source 1a, an objective lens, a photographing device for photographing a confocal image, a confocal optical scanner 2 for scanning the sample 13 with light outputted from the light source 1a through the objective lens and outputting return light from the sample 13 to the photographing device, an XYZ stage 5 for moving the position of the sample 13, aθxz stage 14 for rotating the sample 13, and a controller 18 for turning the surface of the sample 13 to a converged optical axis by entering the confocal image photographed by the photographing device and controlling the position of the XYZ stage 5 and the rotation of theθxz stage 14.
|
