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发明名称
Testsondenanordnung mit Knicknadeln
摘要
申请公布号
DE69326609(D1)
申请公布日期
1999.11.04
申请号
DE19936026609
申请日期
1993.07.23
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
BRANDT, WOLFRAM;MARQUART, BERND;STOEHR, ROLAND R.
分类号
G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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