| 摘要 |
<p>A method for measuring a structure that contains overlying and underlying films (62, 64) in a region (70) where the overlying film's thickness rapidly decreases until the underlying film is exposed (69) (e.g., an edge-exclusion structure). The method includes the steps of: (1) exciting acoustic modes in a first portion of the region with at least one excitation laser beam (205); (2) detecting the acoustic modes with a probe laser beam (216) that is either reflected or diffracted to generate a signal beam (216a); (3) analyzing the signal beam to determine a property of the structure (e.g., the thickness of the overlying layer) in the first portion of the region; (4) translating the structure or the excitation and probe laser beams; and (5) repeating the exciting, detecting, and analyzing steps to determine a property of the structure in a second portion of the region.</p> |
