METHOD AND APPARATUS FOR TESTING INTERCONNECT NETWORKS

摘要

Method and apparatus for testing interconnect networks, by generating at lea st two plasma jets, each in the vicinity of a distinct point (12, 13) of the circuit to be tested, applying a voltage difference whereby to cause an electric current to flow between the points through the circuit, to each poi nt through the corresponding plasma jet and maintaining the current flow to car ry out the testing process. Each plasma jet is generated by producing a dischar ge between two electrodes within a cavity, said plasma being ejected out throug h an orifice. The apparatus comprises at least two plasma injector-electrodes (14, 16) to drive an electric current between two points of the circuit to b e tested, each so positioned or positionable as to direct the plasma generated thereby to one of the two points, a first electric circuit (21, 27) to suppl y voltage to each plasma injector-electrode, means (18, 20) for supplying gas to each plasma injector-electrode, and a second electric circuit (21, 27) simil ar or different from the first electric circuit, to sustain electric discharge.