发明名称 Information processing apparatus using an offset signal to control the position of a probe
摘要 An information processing apparatus, which utilizes a physical phenomenon occurring between a probe and a sample to detect information from the sample, includes a device for moving the probe in order to adjust a clearance between the probe and the sample, a device for detecting a physical phenomenon occurring between the probe and the sample, a device for generating a control signal for the moving device to change the clearance between the probe and the sample to a desired clearance, based on a result of detection of the detecting device, and a device for applying an offset signal to the control signal in order that the probe can move with respect to a reference located at a position deviated from a center position of a movable range of the probe by means of the moving device.
申请公布号 US5978326(A) 申请公布日期 1999.11.02
申请号 US19950565897 申请日期 1995.12.01
申请人 CANON KABUSHIKI KAISHA 发明人 SHIDO, SHUNICHI
分类号 G01R1/06;G01B7/34;G01N27/00;G01Q10/00;G01Q10/02;G01Q10/04;G01Q60/10;G01Q60/16;G01Q80/00;G02B21/00;G11B5/40;G11B7/095;G11B9/00;G11B9/14;G11B19/04;(IPC1-7):G11B7/095 主分类号 G01R1/06
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