SUBLIMED COMPONENT REMOVING UNIT AND HEAT TREATMENT DEVICE PROVIDED WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a sublimed component removing unit for discharging gas from which sublimed components have been removed to outside the device, and a heat treatment device provided with the same. SOLUTION: A substrate W mounted on a mount 3 of a heat treatment unit 1 is heated by a heater 1a. By this heating, subliming components are volatized together with volatile components contained in a coating agent on the substrate W. Gas containing the subliming components is introduced into a casing 51 of a subliming component removing unit 5. The introduced gas is cooled by a cooling surface 53a of a cooling bat 53. By this cooling, the subliming components in the gas are solidified and deposited on the cooling surface 53a to remove them. The gas from which the subliming components have been removed is discharged from a discharge port 56. Therefore, the subliming components are prevented from being solidified in a discharge duct 8.