CORROSION RESISTANT CERAMIC MEMBER

摘要

PROBLEM TO BE SOLVED: To obtain a corrosion resistant ceramic member having a fluoride surface layer excellent in adhesion to the ceramic base material and exhibiting high corrosion resistance to halogen-contg. corrosive gas plasma. SOLUTION: When a fluoride surface layer is formed on a ceramic base material to obtain a ceramic member, a ceramic-fluoride middle layer is formed between the ceramic base material and the fluoride surface layer. The middle layer is predominantly formed together with the fluoride surface layer by immersing a ceramic sintered body in hydrofluoric acid and carrying out heating.