发明名称 Testing ESD protection schemes in semiconductor integrated circuits
摘要 Circuitry for testing and comparing ESD protection structures is provided on a semiconductor integrated circuit. Analysis of charge transmitted to a test capacitor on board the chip provides for improved accuracy in evaluating performance of the ESD protection structure. Moreover, multiple ESD structures can be implemented and accurately compared to one another on a test chip as described. The disclosed methods and apparatus are usefull in reduced turn-around time and more accurate evaluation and comparison of ESD protection structures in integrated circuits.
申请公布号 US5978197(A) 申请公布日期 1999.11.02
申请号 US19970972231 申请日期 1997.11.18
申请人 LSI CORPORATION 发明人 CHAN, VICTER
分类号 G01R31/00;G01R31/28;(IPC1-7):H02H3/22 主分类号 G01R31/00
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