摘要 |
Circuitry for testing and comparing ESD protection structures is provided on a semiconductor integrated circuit. Analysis of charge transmitted to a test capacitor on board the chip provides for improved accuracy in evaluating performance of the ESD protection structure. Moreover, multiple ESD structures can be implemented and accurately compared to one another on a test chip as described. The disclosed methods and apparatus are usefull in reduced turn-around time and more accurate evaluation and comparison of ESD protection structures in integrated circuits.
|