| 摘要 |
In a damping apparatus, a magnet section is connected to a vibration-elimination-table mounting frame on the side of a vibration elimination table via layered rubber blocks that are rigid in the axial direction but flexible in directions perpendicular to the axial direction, so that with respect to the mounting frame, the magnet section is supported to be flexible in the direction of force generated by a drive coil but rigid in the directions perpendicular to the direction of the force. The magnet section is supported by a floor mounting frame on the floor side via layered rubber blocks, so that with respect to the floor mounting frame, the magnet section is supported to be rigid in the direction of the force but flexible in directions perpendicular to the direction of the force. Accordingly, an air gap in which a drive coil is disposed can be narrowed, while preventing interference of the drive coil, so that a larger force can be generated in order to damp the vibration elimination table while preventing the magnetic flux density from decreasing. Moreover, the layered rubber blocks shut off vertical vibrations of the floor.
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