发明名称 Integrated circuitry fuse forming methods, integrated circuitry programming methods, and related integrated circuitry
摘要 Integrated circuitry fuse forming methods, integrated circuitry programming methods, and related integrated circuitry are described. In one implementation, a first layer comprising a first conductive material is formed over a substrate. A second layer comprising a second conductive material different from the first conductive material is formed over the first layer and in conductive connection therewith. A fuse area is formed by removing at least a portion of one of the first and second layers. In a preferred aspect, an assembly of layers comprising one layer disposed intermediate two conductive layers is provided. At least a portion of the one layer is removed from between the two layers to provide a void therebetween. In another aspect, programming circuitry is provided over a substrate upon which the assembly of layers is provided. The programming circuitry comprises at least one MOS device which is capable of being utilized to provide a programming voltage which is sufficient to blow the fuse, and which is no greater than the breakdown voltage of the one MOS device.
申请公布号 US5976917(A) 申请公布日期 1999.11.02
申请号 US19980015414 申请日期 1998.01.29
申请人 MICRON TECHNOLOGY, INC. 发明人 MANNING, H. MONTGOMERY
分类号 H01L23/525;(IPC1-7):H01L29/00 主分类号 H01L23/525
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